Efecto del argon en películas CN<sub>x</sub>H<sub>y</sub> depositadas mediante ECR-CVD
Carbon nitride films have been deposited by ECR-CVD, from Ar/CH4/N2 gas mixtures with different methane concentrations. Infrared Spectroscopy (IRS) and Elastic Recoil Detection Analysis (ERDA) have been used for films characterisation and Optical Emission Spectroscopy (OES) for plasma analysis. Argo...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2004-04-01
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| Series: | Boletín de la Sociedad Española de Cerámica y Vidrio |
| Subjects: | |
| Online Access: | http://ceramicayvidrio.revistas.csic.es/index.php/ceramicayvidrio/article/view/577/597 |