LASER-INDUCED SURFACE ACOUSTIC WAVES FOR THIN FILM CHARACTERIZATION
Knowledge of mechanical properties of thin films is essential for most of their applications. However, their determination can be problematic for very thin films. LAW (Laser-induced acoustic waves) is a combined acousto-optic method capable of measuring films with thickness from few nanometers. It u...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
CTU Central Library
2020-06-01
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| Series: | Acta Polytechnica CTU Proceedings |
| Subjects: | |
| Online Access: | https://ojs.cvut.cz/ojs/index.php/APP/article/view/6686 |