Low-temperature growth of epitaxial Ti2AlC MAX phase thin films by low-rate layer-by-layer PVD
Here we report on the structural and tribo-mechanical characterization of epitaxial single-crystalline Ti2AlC MAX phase thin films, grown by means of electron beam physical vapor deposition at relatively low temperature (700°C). The growth of phase pure Ti2AlC at a relatively lower temperature when...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
Taylor & Francis Group
2019-06-01
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Series: | Materials Research Letters |
Subjects: | |
Online Access: | http://dx.doi.org/10.1080/21663831.2019.1594428 |