Energy savings approaches for high-tech manufacturing factories

This study integrates a fab energy simulation (FES) tool and energy conversion factors to analyze energy consumption and identify energy savings opportunities of high-tech manufacturing factories. The data used is the 169,124 MW h annual energy consumption of a Taiwanese semiconductor manufacturing...

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Bibliographic Details
Main Authors: Shih-Cheng Hu, Tee Lin, Shao-Huan Huang, Ben-Ran Fu, Ming-Hsuan Hu
Format: Article
Language:English
Published: Elsevier 2020-02-01
Series:Case Studies in Thermal Engineering
Online Access:http://www.sciencedirect.com/science/article/pii/S2214157X19304253