Energy savings approaches for high-tech manufacturing factories
This study integrates a fab energy simulation (FES) tool and energy conversion factors to analyze energy consumption and identify energy savings opportunities of high-tech manufacturing factories. The data used is the 169,124 MW h annual energy consumption of a Taiwanese semiconductor manufacturing...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2020-02-01
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Series: | Case Studies in Thermal Engineering |
Online Access: | http://www.sciencedirect.com/science/article/pii/S2214157X19304253 |