A Bionic MEMS Electronic Stethoscope With Double-Sided Diaphragm Packaging
In this paper, an electronic stethoscope is designed based on a bionic Micro-Electro-Mechanical System (MEMS) sound-sensitive sensor. Inspired by the strong sound reflection effect of the water-air interface, a double-sided diaphragm MEMS electronic stethoscope (DMES) encapsulated by a novel double-...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2021-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9350589/ |