Vision-Inspection-Synchronized Dual Optical Coherence Tomography for High-Resolution Real-Time Multidimensional Defect Tracking in Optical Thin Film Industry

Vision-Inspection-Synchronized Dual Optical Coherence Tomography for High-Resolution Real-Time Multidimensional Defect Tracking in Optical Thin Film Industry

Large-scale product inspection is an important aspect in thin film industry to identify defects with a high precision. Although vision line scan camera (VLSC)-based inspection has been frequently implemented, it is limited to surface inspections. Therefore, to overcome the conventional drawbacks, th...

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Bibliographic Details
Main Authors: Deokmin Jeon, Unsang Jung, Kibeom Park, Pilun Kim, Sangyeob Han, Hyosang Jeong, Ruchire Eranga Wijesinghe, Naresh Kumar Ravichandran, Jaeyul Lee, Youngmin Han, Mansik Jeon, Jeehyun Kim
Format: Article
Language:English
Published: IEEE 2020-01-01
Series:IEEE Access
Subjects:
Automatic optical inspection
machine vision
optical coherence tomography
optical films
parallel processing
Online Access:https://ieeexplore.ieee.org/document/9224628/

Internet

https://ieeexplore.ieee.org/document/9224628/

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