Reduction of Photoluminescence Quenching by Deuteration of Ytterbium-Doped Amorphous Carbon-Based Photonic Materials

Reduction of Photoluminescence Quenching by Deuteration of Ytterbium-Doped Amorphous Carbon-Based Photonic Materials

In situ Yb-doped amorphous carbon thin films were grown on Si substrates at low temperatures (<200 °C) by a simple one-step RF-PEMOCVD system as a potential photonic material for direct integration with Si CMOS back end-of-line processing. Room temperature photoluminescence around 1 µm was ob...

Full description

Bibliographic Details
Main Authors: Hui-Lin Hsu, Keith R. Leong, I-Ju Teng, Michael Halamicek, Jenh-Yih Juang, Sheng-Rui Jian, Li Qian, Nazir P. Kherani
Format: Article
Language:English
Published: MDPI AG 2014-08-01
Series:Materials
Subjects:
RF-PEMOCVD
fluorinated ytterbium metal-organic compound
deuterated
hydrogenated
amorphous carbon
Online Access:http://www.mdpi.com/1996-1944/7/8/5643

Internet

http://www.mdpi.com/1996-1944/7/8/5643

Similar Items