Reduction of Photoluminescence Quenching by Deuteration of Ytterbium-Doped Amorphous Carbon-Based Photonic Materials
In situ Yb-doped amorphous carbon thin films were grown on Si substrates at low temperatures (<200 °C) by a simple one-step RF-PEMOCVD system as a potential photonic material for direct integration with Si CMOS back end-of-line processing. Room temperature photoluminescence around 1 µm was ob...
Main Authors: | Hui-Lin Hsu, Keith R. Leong, I-Ju Teng, Michael Halamicek, Jenh-Yih Juang, Sheng-Rui Jian, Li Qian, Nazir P. Kherani |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2014-08-01
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Series: | Materials |
Subjects: | |
Online Access: | http://www.mdpi.com/1996-1944/7/8/5643 |
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