Resonance Spectrum Characteristics of Effective Electromechanical Coupling Coefficient of High-Overtone Bulk Acoustic Resonator
A high-overtone bulk acoustic resonator (HBAR) consisting of a piezoelectric film with two electrodes on a substrate exhibits a high quality factor (Q) and multi-mode resonance spectrum. By analyzing the influences of each layer’s material and structure (thickness) parameters on the effective electr...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2016-09-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/7/9/159 |