Investigation of TSV Liner Interface With Multiwell Structured TSV to Suppress Noise Propagation in Mixed-Signal 3D-IC

Mixed-signal 3D-ICs have a stacked structure of digital and analog circuit chips. In this study, the effect of noise propagation from a digital circuit on an analog circuit was evaluated using an actual mixed-signal 3D-IC. The noise propagation via through-silicon vias (TSVs) was measured, with a ri...

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Bibliographic Details
Main Authors: Hisashi Kino, Takafumi Fukusima, Tetsu Tanaka
Format: Article
Language:English
Published: IEEE 2019-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
Online Access:https://ieeexplore.ieee.org/document/8805089/