Electrical Defect Imaging of ITO Coated Glass by Optical Microscope With Microwave Heating
We present a new optical method for the electrical defect inspection for indium tin oxide (ITO) thin film on a glass substrate. The present method is based on the visualization of the microwave heating distribution around an electrical defect from the thermal stress distribution of the glass substra...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IEEE
2019-01-01
|
| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8672863/ |