Electrical Defect Imaging of ITO Coated Glass by Optical Microscope With Microwave Heating

Electrical Defect Imaging of ITO Coated Glass by Optical Microscope With Microwave Heating

We present a new optical method for the electrical defect inspection for indium tin oxide (ITO) thin film on a glass substrate. The present method is based on the visualization of the microwave heating distribution around an electrical defect from the thermal stress distribution of the glass substra...

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Bibliographic Details
Main Authors: Hanju Lee, Zhirayr Baghdasaryan, Barry Friedman, Kiejin Lee
Format: Article
Language:English
Published: IEEE 2019-01-01
Series:IEEE Access
Subjects:
Microwave imaging
defect detection
optical inspection technology
Online Access:https://ieeexplore.ieee.org/document/8672863/
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spelling doaj-2ca6cea525a947d6bc75141ccff2c85c2021-03-29T22:49:10ZengIEEEIEEE Access2169-35362019-01-017422014220910.1109/ACCESS.2019.29070138672863Electrical Defect Imaging of ITO Coated Glass by Optical Microscope With Microwave HeatingHanju Lee0Zhirayr Baghdasaryan1Barry Friedman2Kiejin Lee3https://orcid.org/0000-0001-5267-9586Department of Physics and Basic Science, Institute for Cell Damage Control, Sogang University, Seoul, South KoreaDepartment of Physics and Basic Science, Institute for Cell Damage Control, Sogang University, Seoul, South KoreaDepartment of Physics, Sam Houston State University, Huntsville, TX, USADepartment of Physics and Basic Science, Institute for Cell Damage Control, Sogang University, Seoul, South KoreaWe present a new optical method for the electrical defect inspection for indium tin oxide (ITO) thin film on a glass substrate. The present method is based on the visualization of the microwave heating distribution around an electrical defect from the thermal stress distribution of the glass substrate of ITO-glass. By using a conventional polarized microscope with microwave irradiation (6 ~ 15 GHz), we show that the present method provides a non-contact and non-destructive way to inspect an electrical defect of a transparent conductive thin film with a minimum detectable defect length of 1 mm and a parallel sensing of electrical defects distributed in a 40 mm by 30 mm area. The high resolution and wide field of view of the present method are attractive features for the practical application of this inspection technology.https://ieeexplore.ieee.org/document/8672863/Microwave imagingdefect detectionoptical inspection technology
collection DOAJ
language English
format Article
sources DOAJ
author Hanju Lee
Zhirayr Baghdasaryan
Barry Friedman
Kiejin Lee
spellingShingle Hanju Lee
Zhirayr Baghdasaryan
Barry Friedman
Kiejin Lee
Electrical Defect Imaging of ITO Coated Glass by Optical Microscope With Microwave Heating
IEEE Access
Microwave imaging
defect detection
optical inspection technology
author_facet Hanju Lee
Zhirayr Baghdasaryan
Barry Friedman
Kiejin Lee
author_sort Hanju Lee
title Electrical Defect Imaging of ITO Coated Glass by Optical Microscope With Microwave Heating
title_short Electrical Defect Imaging of ITO Coated Glass by Optical Microscope With Microwave Heating
title_full Electrical Defect Imaging of ITO Coated Glass by Optical Microscope With Microwave Heating
title_fullStr Electrical Defect Imaging of ITO Coated Glass by Optical Microscope With Microwave Heating
title_full_unstemmed Electrical Defect Imaging of ITO Coated Glass by Optical Microscope With Microwave Heating
title_sort electrical defect imaging of ito coated glass by optical microscope with microwave heating
publisher IEEE
series IEEE Access
issn 2169-3536
publishDate 2019-01-01
description We present a new optical method for the electrical defect inspection for indium tin oxide (ITO) thin film on a glass substrate. The present method is based on the visualization of the microwave heating distribution around an electrical defect from the thermal stress distribution of the glass substrate of ITO-glass. By using a conventional polarized microscope with microwave irradiation (6 ~ 15 GHz), we show that the present method provides a non-contact and non-destructive way to inspect an electrical defect of a transparent conductive thin film with a minimum detectable defect length of 1 mm and a parallel sensing of electrical defects distributed in a 40 mm by 30 mm area. The high resolution and wide field of view of the present method are attractive features for the practical application of this inspection technology.
topic Microwave imaging
defect detection
optical inspection technology
url https://ieeexplore.ieee.org/document/8672863/
work_keys_str_mv AT hanjulee electricaldefectimagingofitocoatedglassbyopticalmicroscopewithmicrowaveheating
AT zhirayrbaghdasaryan electricaldefectimagingofitocoatedglassbyopticalmicroscopewithmicrowaveheating
AT barryfriedman electricaldefectimagingofitocoatedglassbyopticalmicroscopewithmicrowaveheating
AT kiejinlee electricaldefectimagingofitocoatedglassbyopticalmicroscopewithmicrowaveheating
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