Electrical Defect Imaging of ITO Coated Glass by Optical Microscope With Microwave Heating
We present a new optical method for the electrical defect inspection for indium tin oxide (ITO) thin film on a glass substrate. The present method is based on the visualization of the microwave heating distribution around an electrical defect from the thermal stress distribution of the glass substra...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2019-01-01
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Series: | IEEE Access |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/8672863/ |