Two-Dimensional Models of Thermoelastic Damping for Out-of-Plane Vibration of Microrings With Circular Cross-Section
Thermoelastic damping is an important dissipation mechanism in microresonators. This article presents an analytical model of thermoelastic damping for out-of-plane vibration of microrings with circular cross-section by considering two-dimensional heat conduction. The temperature field of the circula...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2020-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9272789/ |