A Micromachined Coupled-Cantilever for Piezoelectric Energy Harvesters

A Micromachined Coupled-Cantilever for Piezoelectric Energy Harvesters

This paper presents a demonstration of the feasibility of fabricating micro-cantilever harvesters with extended stress distribution and enhanced bandwidth by exploiting an M-shaped two-degrees-of-freedom design. The measured mechanical response of the fabricated device displays the predicted dual re...

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Bibliographic Details
Main Authors: Agin Vyas, Henrik Staaf, Cristina Rusu, Thorbjörn Ebefors, Jessica Liljeholm, Anderson D. Smith, Per Lundgren, Peter Enoksson
Format: Article
Language:English
Published: MDPI AG 2018-05-01
Series:Micromachines
Subjects:
piezoelectric micro-energy harvester
lead zirconate titanate
bandwidth broadening
coupled cantilevers
enhanced stress distribution
finite element modeling
microelectromechanical systems (MEMS)
Online Access:http://www.mdpi.com/2072-666X/9/5/252

Internet

http://www.mdpi.com/2072-666X/9/5/252

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