A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators

A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators

This paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators. Two sets of the 3-DoF mechanically coupled resonators are used on either side of the single pr...

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Bibliographic Details
Main Authors: Muhammad Mubasher Saleem, Shayaan Saghir, Syed Ali Raza Bukhari, Amir Hamza, Rana Iqtidar Shakoor, Shafaat Ahmed Bazaz
Format: Article
Language:English
Published: MDPI AG 2021-03-01
Series:Micromachines
Subjects:
dynamic range
finite-element-method
MEMS accelerometer
mode-localization
mode-aliasing
nonlinearity
Online Access:https://www.mdpi.com/2072-666X/12/3/310

Internet

https://www.mdpi.com/2072-666X/12/3/310

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