Suspended silicon waveguide platform with subwavelength grating metamaterial cladding for long-wave infrared sensing applications
Long-wave infrared (LWIR, 6–14 µm) processes enormous potential for chem/biosensing as it covers abundant molecular absorption fingerprints. Waveguides provide an attractive chip-scale miniaturization solution for optical sensors. However, the exploration of waveguide sensors in this wavelength rang...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
De Gruyter
2021-05-01
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| Series: | Nanophotonics |
| Subjects: | |
| Online Access: | https://doi.org/10.1515/nanoph-2021-0029 |