Application of hydrogen injection and oxidation to low temperature solution-processed oxide semiconductors
Solution-processed oxide semiconductors are promising candidates for the low cost, large scale fabrication of oxide thin-film transistors (TFTs). In this work, a method using hydrogen injection and oxidation (HIO) that allows the low temperature solution processing of oxide semiconductors was demons...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2016-08-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4961711 |