Optimization of MBE Growth Conditions of In<sub>0.52</sub>Al<sub>0.48</sub>As Waveguide Layers for InGaAs/InAlAs/InP Quantum Cascade Lasers
We investigate molecular beam epitaxy (MBE) growth conditions of micrometers-thick In<sub>0.52</sub>Al<sub>0.48</sub>As designed for waveguide of InGaAs/InAlAs/InP quantum cascade lasers. The effects of growth temperature and V/III ratio on the surface morphology and defect s...
Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2019-05-01
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Series: | Materials |
Subjects: | |
Online Access: | https://www.mdpi.com/1996-1944/12/10/1621 |