A Holistic Approach to Automated Synthesis of Mixed-technology Digital MEMS Sensors Part 2: Synthesis of a MEMS System with Associated Control Loop
Part 2 of this paper presents a holistic synthesis approach to designing both the mechanical layout and associated electronic control in a mixed-domain MEMS sensor. It develops further the concepts presented in Part 1 which focuses on layout synthesis of the mechanical part only. A case study is dis...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2010-06-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/june_2010/P_625.pdf |