Enhanced Humidity Sensing Response of SnO<sub>2</sub>/Silicon Nanopillar Array by UV Irradiation

Enhanced Humidity Sensing Response of SnO<sub>2</sub>/Silicon Nanopillar Array by UV Irradiation

In this work, a silicon nanopillar array was created with nanosphere lithography. SnO<sub>2</sub> film was deposited on this nanostructure by magnetron sputtering to form an SnO<sub>2</sub>/silicon nanopillar array sensor. The humidity sensitivity, response time, and recovery...

Full description

Bibliographic Details
Main Authors: Wei Li, Linlin Wang, Yun Cai, Peifeng Pan, Jinze Li, Qingying Ren, Jie Xu
Format: Article
Language:English
Published: MDPI AG 2019-05-01
Series:Sensors
Subjects:
humidity sensing
SnO<sub>2</sub> film
silicon nanopillar array
UV light
Online Access:https://www.mdpi.com/1424-8220/19/9/2141

Internet

https://www.mdpi.com/1424-8220/19/9/2141

Similar Items