An Ensembled Anomaly Detector for Wafer Fault Detection
The production process of a wafer in the semiconductor industry consists of several phases such as a diffusion and associated defectivity test, parametric test, electrical wafer sort test, assembly and associated defectivity tests, final test, and burn-in. Among these, the fault detection phase is c...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-08-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/21/16/5465 |