Microstructure and Photothermal Conversion Performance of Ti/(Mo-TiAlN)/(Mo-TiAlON)/Al<sub>2</sub>O<sub>3</sub> Selective Absorbing Film for Non-Vacuum High-Temperature Applications

Microstructure and Photothermal Conversion Performance of Ti/(Mo-TiAlN)/(Mo-TiAlON)/Al<sub>2</sub>O<sub>3</sub> Selective Absorbing Film for Non-Vacuum High-Temperature Applications

This paper aims to clarify the phase composition in each sub-layer of tandem absorber TiMoAlON film and verify its thermal stability. The deposited multilayer Ti/(Mo-TiAlN)/(Mo-TiAlON)/Al<sub>2</sub>O<sub>3</sub> films include an infrared reflectance layer, light interference...

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Bibliographic Details
Main Authors: Haibin Geng, Hanzhe Ye, Xingliang Chen, Sibin Du
Format: Article
Language:English
Published: MDPI AG 2021-12-01
Series:Applied Sciences
Subjects:
TiMoAlON film
dual gas reactive sputtering
plasma emission monitor
selective absorbing
photothermal application
Online Access:https://www.mdpi.com/2076-3417/11/1/124

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https://www.mdpi.com/2076-3417/11/1/124

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