Real-Time Direction Judgment System of Sub-Nanometer Scale Grating Ruler

Real-Time Direction Judgment System of Sub-Nanometer Scale Grating Ruler

This paper presents the design of a real-time direction judgment system for a sub-nanometer scale grating ruler based on field-programmable gate array (FPGA) technology. On the basis of the working principle of the grating ruler reading head, the characteristics of the grating ruler phase signal are...

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Bibliographic Details
Main Authors: Simin Li, Jingkun Wang, Wentao Zhang, Hao Du, Xianming Xiong
Format: Article
Language:English
Published: IEEE 2021-01-01
Series:IEEE Access
Subjects:
Direction judgment
grating ruler
electronic subdivision
FPGA implementation
Online Access:https://ieeexplore.ieee.org/document/9432973/

Internet

https://ieeexplore.ieee.org/document/9432973/

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