Real-Time Direction Judgment System of Sub-Nanometer Scale Grating Ruler
This paper presents the design of a real-time direction judgment system for a sub-nanometer scale grating ruler based on field-programmable gate array (FPGA) technology. On the basis of the working principle of the grating ruler reading head, the characteristics of the grating ruler phase signal are...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2021-01-01
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Series: | IEEE Access |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/9432973/ |