Laser Micromilling Technology as a Key for Rapid Prototyping SMD ceramic MEMS devices
The flexible laser micromilling technology for ceramic MEMS producing of microhotplate in the surface mounted device (SMD) package for the metal oxide (MOX) gas sensors is describing. There are discusses technological and economic aspects of small-scale production of gas MOX sensors in comparison wi...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2018-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | https://doi.org/10.1051/matecconf/201820704003 |