Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching

Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching

The research field of metasurfaces has attracted considerable attention in recent years due to its high potential to achieve flat, ultrathin optical devices of high performance. Metasurfaces, consisting of artificial patterns of subwavelength dimensions, often require fabrication techniques with hig...

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Bibliographic Details
Main Authors: Angela M. Baracu, Christopher A. Dirdal, Andrei M. Avram, Adrian Dinescu, Raluca Muller, Geir Uri Jensen, Paul Conrad Vaagen Thrane, Hallvard Angelskår
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Micromachines
Subjects:
metasurface fabrication
cryogenic etching
bosch process
deep reactive ion etching
Online Access:https://www.mdpi.com/2072-666X/12/5/501

Internet

https://www.mdpi.com/2072-666X/12/5/501

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