Boundary-directed epitaxy of block copolymers

Directing the position, orientation, and long-range lateral order of block copolymer domains to produce technologically-useful, sublithographic patterns is a challenge. Here, the authors present a promising approach to overcome the challenge by directing assembly using spatial boundaries between pla...

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Bibliographic Details
Main Authors: Robert M. Jacobberger, Vikram Thapar, Guang-Peng Wu, Tzu-Hsuan Chang, Vivek Saraswat, Austin J. Way, Katherine R. Jinkins, Zhenqiang Ma, Paul F. Nealey, Su-Mi Hur, Shisheng Xiong, Michael S. Arnold
Format: Article
Language:English
Published: Nature Publishing Group 2020-08-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-020-17938-3