Controllable Preparation and the Tribological Properties of Bimetal Oxide ZnxTiyOz
The bimetallic oxide films with different contents of Zn and Ti were prepared by magnetron sputtering and the films were annealed at 600°C. The relationship between the structure and properties with different content of elements before and after annealed was comprehensively analyzed. It was found th...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
EDP Sciences
2020-01-01
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Series: | E3S Web of Conferences |
Online Access: | https://www.e3s-conferences.org/articles/e3sconf/pdf/2020/73/e3sconf_acic2020_01029.pdf |