| Summary: | The bimetallic oxide films with different contents of Zn and Ti were prepared by magnetron sputtering and the films were annealed at 600°C. The relationship between the structure and properties with different content of elements before and after annealed was comprehensively analyzed. It was found that with the decrease of Zn content, the number of the nuclear inside the film increased and the surface became denser. Therefore, the hardness and bonding strength gradually increased. The friction coefficient and the wear rate of the film were 0.154 and 7.4×10-6 mm3/N/m respectively, due to the formation of ZnTiO3 and ZnO composite phases with lubricity on the surface.
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