Equivalent circuit and numerical analyses of an inductively coupled plasma torch with a tapped induction coil
Equivalent circuit and numerical analyses of an Ar-N2 inductively coupled plasma (ICP) were conducted in order to clarify the effect of the induction coil with a grounded tap on the electrical characteristics of an ICP torch system. First, from the computational results, it was revealed that the loa...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2018-11-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5040996 |