Vibration-Induced Errors in MEMS Tuning Fork Gyroscopes with Imbalance

Vibration-Induced Errors in MEMS Tuning Fork Gyroscopes with Imbalance

This paper discusses the vibration-induced error in non-ideal MEMS tuning fork gyroscopes (TFGs). Ideal TFGs which are thought to be immune to vibrations do not exist, and imbalance between two gyros of TFGs is an inevitable phenomenon. Three types of fabrication imperfections (i.e., stiffness imbal...

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Bibliographic Details
Main Authors: Xiang Fang, Linxi Dong, Wen-Sheng Zhao, Haixia Yan, Kwok Siong Teh, Gaofeng Wang
Format: Article
Language:English
Published: MDPI AG 2018-05-01
Series:Sensors
Subjects:
vibration
TFG
simulation
imbalance
error output
coupling
Online Access:http://www.mdpi.com/1424-8220/18/6/1755

Internet

http://www.mdpi.com/1424-8220/18/6/1755

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