Development of Indium Titanium Zinc Oxide Thin Films Used as Sensing Layer in Gas Sensor Applications
InTiZnO gas sensors with different oxygen ratios were fabricated by RF sputtering at room temperature. The sensing responses for five different gases, including ethanol, isopropanol (IPA), acetone (ACE), CO, and SO<sub>2</sub>, were reported. The InTiZnO gas sensor with the MSM (metal–se...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-07-01
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| Series: | Coatings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-6412/11/7/807 |