A Novel, Hybrid-Integrated, High-Precision, Vacuum Microelectronic Accelerometer with Nano-Field Emission Tips

A Novel, Hybrid-Integrated, High-Precision, Vacuum Microelectronic Accelerometer with Nano-Field Emission Tips

In this paper, a novel, hybrid-integrated, high-precision, vacuum microelectronic accelerometer is put forward, based on the theory of field emission; the accelerometer consists of a sensitive structure and an ASIC interface (application-specific integrated circuit). The sensitive structure has a ca...

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Bibliographic Details
Main Authors: Haitao Liu, Kai Wei, Zhengzhou Li, Wengang Huang, Yi Xu, Wei Cui
Format: Article
Language:English
Published: MDPI AG 2018-09-01
Series:Micromachines
Subjects:
field emission
hybrid integrated
vacuum microelectronic
cathode tips array
interface ASIC
Online Access:http://www.mdpi.com/2072-666X/9/10/481

Internet

http://www.mdpi.com/2072-666X/9/10/481

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