Molecular forces in electromechanical integrated electrostatic harmonic actuator
Authors invent an electromechanical integrated electrostatic harmonic actuator. It is more favorable for miniaturization of the electromechanical devices. As the dimensions of the actuator decreases, the effects of the Casimir and van der Waals forces become obvious. Here, effects of the molecular f...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2017-10-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5009740 |