Heterogeneously Integrated InGaAs and Si Membrane Four-Color Photodetector Arrays
We report the design and fabrication of heterogeneously integrated silicon and InGaAs membrane photodetector arrays. Visible and near-infrared (NIR) detection can be achieved by transfer printing a silicon membrane on InGaAs substrate. Based on the penetration-depth-dependent absorption of different...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2016-01-01
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| Series: | IEEE Photonics Journal |
| Online Access: | https://ieeexplore.ieee.org/document/7445929/ |