Dynamic Characterization of MEMS Scanners
A simple yet precise optical characterization technique for beam scanning devices is proposed. The method uses a single photodetector to measure various dynamic characteristics of scanning devices, including frequency, scan angle, scan phase, and the mechanical quality factor, given that the scan wa...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2009-09-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/september_09/P_489.pdf |