Obtaining raised density connections by thermosonic microwelding in 3D integrated microcircuits

The authors consider the processes of obtaining raised density microwelded connections in 3D-integrated microcircuits by the thermosonic microwelding. The processes include the use of the raised frequencies of ultrasound, application of the microinstrument with a thinning of the working end and prec...

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Bibliographic Details
Main Authors: Lanin V. L., Petuhov I. B.
Format: Article
Language:English
Published: Politehperiodika 2014-06-01
Series:Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
Subjects:
Online Access:http://www.tkea.com.ua/tkea/2014/2-3_2014/pdf/09.pdf