Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers—CMUT and PMUT

Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers—CMUT and PMUT

Microelectromechanical system (MEMS)-based mass sensors are proposed as potential candidates for highly sensitive chemical and gas detection applications owing to their miniaturized structure, low power consumption, and ease of integration with readout circuits. This paper presents a new approach in...

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Bibliographic Details
Main Authors: Haleh Nazemi, Jenitha Antony Balasingam, Siddharth Swaminathan, Kenson Ambrose, Muhammad Umair Nathani, Tara Ahmadi, Yameema Babu Lopez, Arezoo Emadi
Format: Article
Language:English
Published: MDPI AG 2020-04-01
Series:Sensors
Subjects:
capacitive micromachined ultrasonic transducer (CMUT)
gas detection
low concentration
mass sensors
microelectromechanical systems (MEMS)
microfabrication
Online Access:https://www.mdpi.com/1424-8220/20/7/2010

Internet

https://www.mdpi.com/1424-8220/20/7/2010

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