Uniformity of Si-containing diamond-like carbon films deposited at different positions by mesh hollow cathode discharge
Diamond-like carbon (DLC) films exhibit exceptional tribological characteristics, but their practical application requires the development of scalable methods for uniform film deposition. For large-area DLC films, the properties of films deposited at different positions may be different, it is neces...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2019-09-01
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| Series: | Results in Physics |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2211379719314081 |