Magnetron sputtering of carbon supersaturated tungsten films – A chemical approach to increase strength

Tungsten (W)-based materials attract significant attention due to their superior mechanical properties. Here, we present a chemical approach based on the addition of carbon (C) for increased strength via the combination of three strengthening mechanisms in W thin films. W:C thin films with C concent...

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Bibliographic Details
Main Authors: S. Fritze, M. Chen, L. Riekehr, B. Osinger, M.A. Sortica, A. Srinath, A.S. Menon, E. Lewin, D. Primetzhofer, J.M. Wheeler, U. Jansson
Format: Article
Language:English
Published: Elsevier 2021-10-01
Series:Materials & Design
Subjects:
PVD
Online Access:http://www.sciencedirect.com/science/article/pii/S0264127521004275