Vision Servo Motion Control and Error Analysis of a Coplanar XXY Stage for Image Alignment Motion
In recent years, as there is demand for smart mobile phones with touch panels, the alignment/compensation system of alignment stage with vision servo control has also increased. Due to the fact that the traditional stacked-type XYθ stage has cumulative errors of assembly and it is heavy, it has been...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2013-01-01
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| Series: | Mathematical Problems in Engineering |
| Online Access: | http://dx.doi.org/10.1155/2013/592312 |