Cantilever Type Acceleration Sensors Made by Roll-to-Roll Slot-Die Coating

This paper presents the fabrication by means of roll-to-roll slot-die coating and characterization of air gap-based cantilever type capacitive acceleration sensors. As the mass of the sensor moves in the opposite direction of the acceleration, a capacitance change occurs. The sensor is designed to h...

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Bibliographic Details
Main Authors: Sang Hoon Lee, Sangyoon Lee
Format: Article
Language:English
Published: MDPI AG 2020-07-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/20/13/3748