Sputtered LiCoO<sub>2</sub> Cathode Materials for All-Solid-State Thin-Film Lithium Microbatteries
This review article presents the literature survey on radio frequency (RF)-magnetron sputtered LiCoO<sub>2</sub> thin films used as cathode materials in all-solid-state rechargeable lithium microbatteries. As the process parameters lead to a variety of texture and preferential orientatio...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-08-01
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| Series: | Materials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1996-1944/12/17/2687 |