Beam Scanning Controller for Proton-Beam Writing
A scanning control system of the ion beam of MeV energies has been developed for the nuclear scanning microprobe and proton-beam writing channel as a part of accelerator-analytical complex based on the Sokol electrostatic accelerator of the Institute of Applied Physics of the National Academy of Sc...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
V.N. Karazin Kharkiv National University Publishing
2021-09-01
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| Series: | East European Journal of Physics |
| Subjects: | |
| Online Access: | https://periodicals.karazin.ua/eejp/article/view/17768 |