Metrological atomic force microscope for calibrating nano-scale step height standards
In this paper, we described a metrological AFM in order to calibrate step height standards used as transfer artefacts for commercial AFMs. With X, Y and Z axes laser displacement interferometers installed, related calibrated results are directly traceable to the SI of metre definition. The step heig...
| Main Author: | |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-12-01
|
| Series: | Measurement: Sensors |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2665917421000726 |