Contact-free experimental determination of the static flexural spring constant of cantilever sensors using a microfluidic force tool
Micro- and nanocantilevers are employed in atomic force microscopy (AFM) and in micro- and nanoelectromechanical systems (MEMS and NEMS) as sensing elements. They enable nanomechanical measurements, are essential for the characterization of nanomaterials, and form an integral part of many nanoscale...
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| Format: | Article |
| Language: | English |
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Beilstein-Institut
2016-03-01
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| Series: | Beilstein Journal of Nanotechnology |
| Subjects: | |
| Online Access: | https://doi.org/10.3762/bjnano.7.43 |