Contact-free experimental determination of the static flexural spring constant of cantilever sensors using a microfluidic force tool
Micro- and nanocantilevers are employed in atomic force microscopy (AFM) and in micro- and nanoelectromechanical systems (MEMS and NEMS) as sensing elements. They enable nanomechanical measurements, are essential for the characterization of nanomaterials, and form an integral part of many nanoscale...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
Beilstein-Institut
2016-03-01
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Series: | Beilstein Journal of Nanotechnology |
Subjects: | |
Online Access: | https://doi.org/10.3762/bjnano.7.43 |