Temperature Frequency Characteristics of Hexamethyldisiloxane (HMDSO) Polymer Coated Rayleigh Surface Acoustic Wave (SAW) Resonators for Gas-Phase Sensor Applications
Temperature induced frequency shifts may compromise the sensor response of polymer coated acoustic wave gas-phase sensors operating in environments of variable temperature. To correct the sensor data with the temperature response of the sensor the latter must be known. This study presents and discus...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2012-05-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/3/2/413 |