Effects of temperature and target power on the sputter-deposition of (Ti,Zr)n+1AlCn MAX-phase thin films
Solid solution MAX phases in the Ti–Zr–Al–C system are investigated by sputter-deposition from elemental (Al, C) and alloy (Ti:Zr 50:50) targets. The effect of substrate temperature in the range 850 °C–1000 °C and different Al target-power are discussed. Lower-temperature conditions yielded films...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-03-01
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| Series: | Results in Materials |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590048X20301011 |