Towards 3D Confocal Imaging with Laser-Machined Micro-Scanner
A micro-scanner made of stainless-steel is fabricated via laser cutting technology for 3D Lissajous confocal imaging. The multi-gimbaled structure of the device provides two orthogonal torsional modes and three different out-of-plane modes. Torsional modes can be used to achieve 2D scan and all of t...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2018-11-01
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Series: | Proceedings |
Subjects: | |
Online Access: | https://www.mdpi.com/2504-3900/2/13/1067 |