Integrated Multichannel Electrochemical–Quartz Crystal Microbalance Sensors for Liquid Sensing

Integrated Multichannel Electrochemical–Quartz Crystal Microbalance Sensors for Liquid Sensing

This paper highlights the design, simulation and fabrication of an array of twelve integrated electrochemical - quartz crystal microbalance (IEQCM) sensors on a single substrate for liquid sensing. Integration of both measurement techniques is made possible by combining the three electrode electroch...

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Bibliographic Details
Main Authors: Ahmad Anwar Zainuddin, Anis Nurashikin Nordin, Ahmad Fairuzabadi Mohd Mansor, Rosminazuin Ab Rahim, Wing Cheung Mak
Format: Article
Language:English
Published: IEEE 2020-01-01
Series:IEEE Access
Subjects:
Quartz crystal microbalance (QCM)
electrochemical impedance spectroscopy (EIS)
sensor arrays
microelectromechanical devices
mass spectroscopy
acoustic devices
Online Access:https://ieeexplore.ieee.org/document/8943177/

Internet

https://ieeexplore.ieee.org/document/8943177/

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